Air Slide Table, Clean, Low Dust Generation 13 / 20 / 22-MXS Series (Part Numbers)

[13-Series Clean Series]
・ This product can be used in a clean environment.
・ Prevents dust generation in the cleanroom.
[20-Series Copper/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided.
・ External dimensions are the same as standard products.
[22-Series, Copper-Free / Fluorine-Free / Silicone-Free + Low Dust Generation]
・ This product can be used in environments with restrictions on copper-based, fluorine-based, and silicone-based materials.
·The structure is the same as the clean series (grease and packaging form are different from the clean series).

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Product specification
Part Numbers
Catalog

Drawing

13·22-MXS6

Basic Type

* Please refer to the digital catalog for information on model numbers other than the above.

Axial piping type (⌀6) 13 · 22MXS6-□□P

* Please refer to the digital catalog for information on model numbers other than the above.
* Other dimensions are the same as the basic form.

13 · 22-MXS6L / symmetrical type

Air slide table clean and low dust generation 13/20/22-MXS series 13 · 22-MXS6L / symmetrical outline drawing

* Please refer to the digital catalog for information on model numbers other than the above.

Product Specifications

Specifications

Cleanliness Class (ISO class)	Rubber Stopper	13-/22-: Class 5
Cylinder Inner Diameter (mm)		6	8	12	16	20	25
Fluid		Air
Action		Double-acting type
Operating Pressure		0.15 to 0.7 MPa
Proof Pressure		1.05 MPa
Ambient and fluid temperature		-10°C to 60°C (no freezing)
Piston Speed		50-300 mm/s
Cushioning		Rubber cushion (standard, with stroke adjuster)
Lubrication		Not required
Stroke Length Tolerance		0 to +1 mm
Grease		13-: Fluorine grease 22-: Lithium soap-based grease
Cleanliness Class (ISO class)	Without Adjuster	13-/22-: Class 5

Specification Table

13·22-MXS6

13 · 22-MXS6L / symmetrical type

Air slide table clean and low dust generation 13/20/22-MXS series 13 · 22-MXS6L / symmetrical standard table

Data to be displayed: 30; 45; 60

Part Number
13-MXS20-100
13-MXS20-100A
13-MXS20-125
13-MXS20-125-A93L
13-MXS20-125AS
13-MXS20-125AT
13-MXS20-150
13-MXS20-150A
13-MXS20L-20
13-MXS20L-75A
13-MXS25-10
13-MXS25-20A
13-MXS25-30
13-MXS25-30A
13-MXS25-30AS
13-MXS25-40
13-MXS25-40A
13-MXS25-50
13-MXS25-50A
13-MXS25-50A-A93L
13-MXS25-50AS
13-MXS25-50AS-A93L
13-MXS25-75
13-MXS25-75A
13-MXS25-75AS
13-MXS25-100
13-MXS25-100AS
13-MXS25-125A
13-MXS25-150
13-MXS25-150A
13-MXS25L-40A
13-MXS25L-50
13-MXS25L-75A
13-MXS25L-150
20-MXS8-20
20-MXS8-75A
20-MXS8L-10
20-MXS8L-20
20-MXS25-30A
20-MXS25-40A
22-MXS6-30
22-MXS6-30A
22-MXS6-30A-A93L
22-MXS6L-30
22-MXS6L-50A
22-MXS6L-50A-A93L
22-MXS8-30
22-MXS12-20AS
22-MXS12-40A
22-MXS12-40A-A93L
22-MXS12L-50
22-MXS25-30

Standard Unit Price	Minimum order quantity	Standard Shipping Days ?	Stroke (mm)	Max. Load Mass (Range Selectable) (kg)	Max. Load Mass (kg)	Table Size Length L (mm)	Cylinder Inner Diameter (Ø)	Usage Environment	Table Size Width W (mm)	Table Size Height H (mm)	Piping Format	Port Screw Type	Adjuster Option	Specifications	Number of Switches	Custom-made Specifications	Model	Type
889.37 €	1	26 Days	100	5~9.2	6	237	20	Dust-Proof / Cleanroom	76	50	Standard type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
969.85 €	1	26 Days	100	5~9.2	6	237	20	Dust-Proof / Cleanroom	76	50	Standard type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
980.19 €	1	26 Days	125	5~9.2	6	291	20	Dust-Proof / Cleanroom	76	50	Standard type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
1,026.48 €	1	26 Days	125	5~9.2	6	291	20	Dust-Proof / Cleanroom	76	50	Standard type	Rc	No adjuster	Standard	A93	3	2 pcs.	Clean series
1,020.44 €	1	26 Days	125	5~9.2	6	291	20	Dust-Proof / Cleanroom	76	50	Standard type	Rc	Forward-end adjuster	Standard	Without auto switch	None	None	Clean series
1,020.44 €	1	26 Days	125	5~9.2	6	291	20	Dust-Proof / Cleanroom	76	50	Standard type	Rc	Reverse-end adjuster	Standard	Without auto switch	None	None	Clean series
1,070.97 €	1	26 Days	150	5~9.2	6	343	20	Dust-Proof / Cleanroom	76	50	Standard type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
1,151.45 €	1	26 Days	150	5~9.2	6	343	20	Dust-Proof / Cleanroom	76	50	Standard type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
639.23 €	1	26 Days	20	5~9.2	6	120	20	Dust-Proof / Cleanroom	76	50	Symmetrical type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
884.60 €	1	26 Days	75	5~9.2	6	184	20	Dust-Proof / Cleanroom	76	50	Symmetrical type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
722.65 €	1	26 Days	10	5~9.2	9	132.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
815.94 €	1	26 Days	20	5~9.2	9	132.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
722.65 €	1	26 Days	30	5~9.2	9	132.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
815.94 €	1	26 Days	30	5~9.2	9	132.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
769.29 €	1	26 Days	30	5~9.2	9	132.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Forward-end adjuster	Standard	Without auto switch	None	None	Clean series
761.53 €	1	26 Days	40	5~9.2	9	142.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
854.81 €	1	26 Days	40	5~9.2	9	142.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
804.11 €	1	26 Days	50	5~9.2	9	155.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
897.39 €	1	26 Days	50	5~9.2	9	155.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
943.66 €	1	26 Days	50	5~9.2	9	155.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Dual-end adjuster	Standard	A93	3	2 pcs.	Clean series
850.74 €	1	26 Days	50	5~9.2	9	155.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Forward-end adjuster	Standard	Without auto switch	None	None	Clean series
897.03 €	1	26 Days	50	5~9.2	9	155.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Forward-end adjuster	Standard	A93	3	2 pcs.	Clean series
910.35 €	1	26 Days	75	5~9.2	9	196.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
993.76 €	1	26 Days	75	5~9.2	9	196.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
947.13 €	1	26 Days	75	5~9.2	9	196.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Forward-end adjuster	Standard	Without auto switch	None	None	Clean series
1,004.27 €	1	26 Days	100	5~9.2	9	237.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
1,050.90 €	1	26 Days	100	5~9.2	9	237.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Forward-end adjuster	Standard	Without auto switch	None	None	Clean series
1,197.61 €	1	26 Days	125	5~9.2	9	295.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
1,202.52 €	1	26 Days	150	5~9.2	9	335.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
1,295.77 €	1	26 Days	150	5~9.2	9	335.5	25	Dust-Proof / Cleanroom	92	62	Standard type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
605.97 €	1	26 Days	40	5~9.2	9	142.5	25	Dust-Proof / Cleanroom	92	62	Symmetrical type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
578.02 €	1	26 Days	50	5~9.2	9	155.5	25	Dust-Proof / Cleanroom	92	62	Symmetrical type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
705.89 €	1	26 Days	75	5~9.2	9	196.5	25	Dust-Proof / Cleanroom	92	62	Symmetrical type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Clean series
864.40 €	1	26 Days	150	5~9.2	9	335.5	25	Dust-Proof / Cleanroom	92	62	Symmetrical type	Rc	No adjuster	Standard	Without auto switch	None	None	Clean series
376.56 €	1	26 Days	20	1~4.9	1	60	8	Copper-Based / Fluorine-Based Material Not Used	40	24	Standard type	M screw	No adjuster	Standard	Without auto switch	None	None	Copper and Fluorine Unavailable Specifications
608.42 €	1	26 Days	75	1~4.9	1	157	8	Copper-Based / Fluorine-Based Material Not Used	40	24	Standard type	M screw	Dual-end adjuster	Standard	Without auto switch	None	None	Copper and Fluorine Unavailable Specifications
338.74 €	1	26 Days	10	1~4.9	1	55	8	Copper-Based / Fluorine-Based Material Not Used	40	24	Symmetrical type	M screw	No adjuster	Standard	Without auto switch	None	None	Copper and Fluorine Unavailable Specifications
338.74 €	1	26 Days	20	1~4.9	1	60	8	Copper-Based / Fluorine-Based Material Not Used	40	24	Symmetrical type	M screw	No adjuster	Standard	Without auto switch	None	None	Copper and Fluorine Unavailable Specifications
578.58 €	1	26 Days	30	5~9.2	9	107	25	Copper-Based / Fluorine-Based Material Not Used	92	62	Standard type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Copper and Fluorine Unavailable Specifications
613.69 €	1	26 Days	40	5~9.2	9	117	25	Copper-Based / Fluorine-Based Material Not Used	92	62	Standard type	Rc	Dual-end adjuster	Standard	Without auto switch	None	None	Copper and Fluorine Unavailable Specifications
542.23 €	1	26 Days	30	0.05~0.8	0.6	83	6	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	32	20	Standard type	M screw	No adjuster	Standard	Without auto switch	None	None	Copper/fluorine/silicon-free + low dust generation
558.52 €	1	26 Days	30	0.05~0.8	0.6	83	6	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	32	20	Standard type	M screw	Dual-end adjuster	Standard	Without auto switch	None	None	Copper/fluorine/silicon-free + low dust generation
604.79 €	1	26 Days	30	0.05~0.8	0.6	83	6	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	32	20	Standard type	M screw	Dual-end adjuster	Standard	A93	3	2 pcs.	Copper/fluorine/silicon-free + low dust generation
566.11 €	1	26 Days	30	0.05~0.8	0.6	83	6	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	32	20	Symmetrical type	M screw	No adjuster	Standard	Without auto switch	None	None	Copper/fluorine/silicon-free + low dust generation
656.85 €	1	26 Days	50	0.05~0.8	0.6	121	6	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	32	20	Symmetrical type	M screw	Dual-end adjuster	Standard	Without auto switch	None	None	Copper/fluorine/silicon-free + low dust generation
677.71 €	1	26 Days	50	0.05~0.8	0.6	121	6	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	32	20	Symmetrical type	M screw	Dual-end adjuster	Standard	A93	3	2 pcs.	Copper/fluorine/silicon-free + low dust generation
510.47 €	1	26 Days	30	1~4.9	1	89	8	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	40	24	Standard type	M screw	No adjuster	Standard	Without auto switch	None	None	Copper/fluorine/silicon-free + low dust generation
601.61 €	1	26 Days	20	1~4.9	2	98	12	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	50	32	Standard type	M screw	Forward-end adjuster	Standard	Without auto switch	None	None	Copper/fluorine/silicon-free + low dust generation
626.10 €	1	26 Days	40	1~4.9	2	110	12	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	50	32	Standard type	M screw	Dual-end adjuster	Standard	Without auto switch	None	None	Copper/fluorine/silicon-free + low dust generation
672.39 €	1	26 Days	40	1~4.9	2	110	12	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	50	32	Standard type	M screw	Dual-end adjuster	Standard	A93	3	2 pcs.	Copper/fluorine/silicon-free + low dust generation
590.52 €	1	26 Days	50	1~4.9	2	130	12	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	50	32	Symmetrical type	M screw	No adjuster	Standard	Without auto switch	None	None	Copper/fluorine/silicon-free + low dust generation
792.89 €	1	26 Days	30	5~9.2	9	132.5	25	Dust-Proof / Copper-Based / Fluorine-Based Material Not Used / Cleanroom	92	62	Standard type	Rc	No adjuster	Standard	Without auto switch	None	None	Copper/fluorine/silicon-free + low dust generation

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Basic information

Type	L-Shaped Table Type	Table Material	Aluminum Alloy	Table Surface Treatment	Hard Anodized Aluminum
Guide	Cross Roller Guide Shape	Operating Pressure(MPa)	0.15 to 0.7

Configure

172Suggestion of an applicable part number.

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The part number is completed.

Basic Attributes

Stroke(mm)
10

20

30

40

50

75

100

125

150
Clear
Max. Load Mass (Range Selectable)(kg)
0.05~0.8

1~4.9

5~9.2
Clear
Max. Load Mass(kg)
0.6

1

2

4

6

9
Clear
Table Size Length L(mm)
55

60

63

73

78

83

89

98

105

106

107

110

116

117

120

121

125

130

131

132.5

142.5

145

155.5

157

175

176

181

184

196.5

229

230

237

237.5

279

291

295.5

335.5

343
Clear
Cylinder Inner Diameter(Ø)
6

8

12

16

20

25
Clear
Usage Environment
- Dust-Proof
- Copper-Based / Fluorine-Based Material Not Used
- Cleanroom
Clear
Table Size Width W(mm)
32

40

50

62

76

92
Clear
Table Size Height H(mm)
20

24

32

40

50

62
Clear
Piping Format
Standard type

Symmetrical type
Clear
Port Screw Type
- M screw
- Rc
Clear
Adjuster Option
Dual-end adjuster

Forward-end adjuster

No adjuster

Reverse-end adjuster
Clear
Specifications
- Axial direction piping type
- Standard
Clear
Number of Switches
M9B

M9N

M9NV

M9P

A93

Without auto switch
Clear
Custom-made Specifications
- 0.5
- 1
- 3
- None
Clear
Model
- 1 pcs.
- 2 pcs.
- None
Clear
Type
- Clean series
- Copper and Fluorine Unavailable Specifications
- Copper/fluorine/silicon-free + low dust generation
Clear
Type
- 13-MXS
- 20-MXS
- 22-MXS
Clear