SMC Vacuum Valves（Flange Type：KF）

Data to be displayed: 30; 45; 60

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XLH, High Vacuum Manual Angle Valve, Bellows Seal

SMC

A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

2D / 3D CAD data available

Starting from^∗ ：	440.59 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

SMC

Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

2D / 3D CAD data available

Starting from^∗ ：	626.70 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

2D / 3D CAD data available

Starting from^∗ ：	462.87 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

SMC

2D / 3D CAD data available

Starting from^∗ ：	472.09 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

SMC

A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

2D / 3D CAD data available

Starting from^∗ ：	884.79 €
Min. Shipping Days ：	22 Days

*Unit price with basic configuration

Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

SMC

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

2D / 3D CAD data available

Starting from^∗ ：	819.61 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve

SMC

A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

2D / 3D CAD data available

Starting from^∗ ：	545.09 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration


Brand
Product Series
CAD
Starting from^∗
Min. Shipping Days ：
Type
Application
Installation method
Number of Ports
Types of solenoid
Switching Type
Electromagnetic valve drive type
Effective Sectional Area(mm2)
Pipe Port Type
Nominal Pipe Thread Size
Connection tube diameter
Flange Type
Flange Calls
Cv Value


Brand	SMC	SMC	SMC	SMC	SMC	SMC	SMC
Product Series	XLH, High Vacuum Manual Angle Valve, Bellows Seal	Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series	Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series	Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series	Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series	Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD	XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve
CAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D
Starting from^∗	440.59 € *Unit price with basic configuration	626.70 € *Unit price with basic configuration	462.87 € *Unit price with basic configuration	472.09 € *Unit price with basic configuration	884.79 € *Unit price with basic configuration	819.61 € *Unit price with basic configuration	545.09 € *Unit price with basic configuration
Min. Shipping Days ：	4 Days	26 Days	26 Days	26 Days	22 Days	26 Days	4 Days
Type	Manual vacuum valve	Pilot Vacuum Valve	Pilot Vacuum Valve	Pilot Vacuum Valve	Vacuum operation vacuum valves	Pilot Vacuum Valve	Manual vacuum valve
Application	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating
Installation method	Direct	Direct	Direct	Direct	Direct	Direct	Direct
Number of Ports	2-port valve	2-port valve	2-port valve	2-port valve	2-port valve	2-port valve	2-port valve
Types of solenoid	-	-	-	-	-	-	-
Switching Type	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed
Electromagnetic valve drive type	-	-	-	-	-	-	-
Effective Sectional Area(mm2)	-	-	-	-	-	-	-
Pipe Port Type	Flange	Flange	Flange	Flange	Flange	Flange	Flange
Nominal Pipe Thread Size	-	-	-	-	-	-	-
Connection tube diameter	-	-	-	-	-	-	-
Flange Type	KF	KF	KF	KF	KF	KF	KF
Flange Calls	16 / 25	25	16	25	25 / 40	25 / 40 / 50	16 / 25 / 40 / 50
Cv Value	-	-	-	-	-	-	-