SMC Vacuum Valves（Installation method：Direct）

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XSA, Normally Closed, High Vacuum Solenoid Valve

SMC

A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
· Flame-retardant (UL94V-0 compliant).
· Two types of fittings (face seal fitting and compression fitting) and female threads (Rc, NPT) are available.
· Moving the spring from the sliding part of the armature iron core to the body reduces the generation of particulate matter caused by contact with the spring.
· Improved sealing performance, securely sealing with its powerful spring.
· Power consumption: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (size 3).
*For DC specification / class B.

2D / 3D CAD data available

Starting from^∗ ：	312.19 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

XMA and XYA / High Vacuum Valves / Stainless Steel / Angle and In-line Types

SMC

A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.

2D / 3D CAD data available

Starting from^∗ ：	520.09 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

ZP2V, Vacuum Saving Valve

SMC

A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.

2D / 3D CAD data available

Starting from^∗ ：	12.45 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

SMC

A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

2D / 3D CAD data available

Starting from^∗ ：	884.79 €
Min. Shipping Days ：	22 Days

*Unit price with basic configuration

Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

2D / 3D CAD data available

Starting from^∗ ：	472.09 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

XVD2, High Vacuum Valve, Smooth Vent

SMC

A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
[Features]
· An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
· Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
· Valve type: Normally closed (pressurize to open, spring seal).
Fluids: Nitrogen, air, inert gas.
· Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
· Weight: 0.5 kg.

2D / 3D CAD data available

Starting from^∗ ：	2,169.57 €
Min. Shipping Days ：	17 Days

*Unit price with basic configuration

XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal

SMC

Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.

2D / 3D CAD data available

Starting from^∗ ：	437.59 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

SMC

Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

2D / 3D CAD data available

Starting from^∗ ：	626.70 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

SMC

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

2D / 3D CAD data available

Starting from^∗ ：	819.61 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve

SMC

A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

2D / 3D CAD data available

Starting from^∗ ：	545.09 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

SMC

2D / 3D CAD data available

Starting from^∗ ：	462.87 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

XLH, High Vacuum Manual Angle Valve, Bellows Seal

SMC

A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

2D / 3D CAD data available

Starting from^∗ ：	440.59 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration


Brand
Product Series
CAD
Starting from^∗
Min. Shipping Days ：
Type
Application
Installation method
Number of Ports
Types of solenoid
Switching Type
Electromagnetic valve drive type
Effective Sectional Area(mm2)
Pipe Port Type
Nominal Pipe Thread Size
Connection tube diameter
Flange Type
Flange Calls
Cv Value


Brand	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC
Product Series	XSA, Normally Closed, High Vacuum Solenoid Valve	XMA and XYA / High Vacuum Valves / Stainless Steel / Angle and In-line Types	ZP2V, Vacuum Saving Valve	Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series	Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series	XVD2, High Vacuum Valve, Smooth Vent	XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal	Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series	Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD	XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve	Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series	XLH, High Vacuum Manual Angle Valve, Bellows Seal
CAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D
Starting from^∗	312.19 € *Unit price with basic configuration	520.09 € *Unit price with basic configuration	12.45 € *Unit price with basic configuration	884.79 € *Unit price with basic configuration	472.09 € *Unit price with basic configuration	2,169.57 € *Unit price with basic configuration	437.59 € *Unit price with basic configuration	626.70 € *Unit price with basic configuration	819.61 € *Unit price with basic configuration	545.09 € *Unit price with basic configuration	462.87 € *Unit price with basic configuration	440.59 € *Unit price with basic configuration
Min. Shipping Days ：	4 Days	4 Days	4 Days	22 Days	26 Days	17 Days	4 Days	26 Days	26 Days	4 Days	26 Days	4 Days
Type	High Vacuum Solenoid	Vacuum operation vacuum valves	Vacuum operation vacuum valves	Vacuum operation vacuum valves	Pilot Vacuum Valve	Manual vacuum valve	Vacuum operation vacuum valves	Pilot Vacuum Valve	Pilot Vacuum Valve	Manual vacuum valve	Pilot Vacuum Valve	Manual vacuum valve
Application	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating
Installation method	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct	Direct
Number of Ports	2-port valve	2-port valve	2-port valve	2-port valve	2-port valve	2-port valve	3-port valve	2-port valve	2-port valve	2-port valve	2-port valve	2-port valve
Types of solenoid	Single	-	-	-	-	-	Single	-	-	-	-	-
Switching Type	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed
Electromagnetic valve drive type	Linear Motion Type	-	-	-	-	-	-	-	-	-	-	-
Effective Sectional Area(mm2)	-	-	0.07 ～ 0.78	-	-	4.6	-	-	-	-	-	-
Pipe Port Type	Rc / NPT / Face Seal Fitting / Compression Fitting	Flange	M / Rc / NPT / Single-Action Pipe	Flange	Flange	Bite type Fittings	Flange	Flange	Flange	Flange	Flange	Flange
Nominal Pipe Thread Size	1/8 / 1/4 / 3/8	-	M5 / 1/8 / M6 / M8	-	-	1/4	-	-	-	-	-	-
Connection tube diameter	-	-	Ø4 / Ø6	-	-	-	-	-	-	-	-	-
Flange Type	-	NW / Other	-	KF	KF	-	NW / Other	KF	KF / CF	KF / CF	KF	KF
Flange Calls	-	16 / 25 / 40 / 50 / 63	-	25 / 40	25	-	16 / 25 / 40 / 63	25	25 / 40 / 50	16 / 25 / 40 / 50	16	16 / 25
Cv Value	-	-	0.0037940379 ～ 0.0422764228	-	-	84.87	-	-	-	-	-	-