SMC Vacuum Valves（Type：Manual vacuum valve）

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XVD2, High Vacuum Valve, Smooth Vent

SMC

A smooth vent valve with an adjustable flow rate for both the initial and main air supplies.
[Features]
· An integrated valve and needle valve structure that requires on 1/4 the piping space of previous models.
· Uses a metal diaphragm for the seat section, greatly reducing the generation of particulate matter.
· Valve type: Normally closed (pressurize to open, spring seal).
Fluids: Nitrogen, air, inert gas.
· Operating temperature: 5 to 60°C (baking temperature, 150°C or less).
· Weight: 0.5 kg.

2D / 3D CAD data available

Starting from^∗ ：	2,169.57 €
Min. Shipping Days ：	17 Days

*Unit price with basic configuration

XLH, High Vacuum Manual Angle Valve, Bellows Seal

SMC

A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

2D / 3D CAD data available

Starting from^∗ ：	440.59 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve

SMC

A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

2D / 3D CAD data available

Starting from^∗ ：	545.09 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration


Brand
Product Series
CAD
Starting from^∗
Min. Shipping Days ：
Type
Application
Installation method
Number of Ports
Types of solenoid
Switching Type
Electromagnetic valve drive type
Effective Sectional Area(mm2)
Pipe Port Type
Nominal Pipe Thread Size
Connection tube diameter
Flange Type
Flange Calls
Cv Value


Brand	SMC	SMC	SMC
Product Series	XVD2, High Vacuum Valve, Smooth Vent	XLH, High Vacuum Manual Angle Valve, Bellows Seal	XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve
CAD	2D / 3D	2D / 3D	2D / 3D
Starting from^∗	2,169.57 € *Unit price with basic configuration	440.59 € *Unit price with basic configuration	545.09 € *Unit price with basic configuration
Min. Shipping Days ：	17 Days	4 Days	4 Days
Type	Manual vacuum valve	Manual vacuum valve	Manual vacuum valve
Application	Single Item Operating	Single Item Operating	Single Item Operating
Installation method	Direct	Direct	Direct
Number of Ports	2-port valve	2-port valve	2-port valve
Types of solenoid	-	-	-
Switching Type	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed
Electromagnetic valve drive type	-	-	-
Effective Sectional Area(mm2)	4.6	-	-
Pipe Port Type	Bite type Fittings	Flange	Flange
Nominal Pipe Thread Size	1/4	-	-
Connection tube diameter	-	-	-
Flange Type	-	KF	KF / CF
Flange Calls	-	16 / 25	16 / 25 / 40 / 50
Cv Value	84.87	-	-