Single Axis Robots(Max. Thrust Force Range:101 to 200)

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Brand
Product Series
CAD
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Min. Shipping Days
Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

    Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

      Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

        Electric actuator rod type motorless specification LEY series

          Electric actuator slider type belt drive LEFB series AC servo motor LECS□

            Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

              Electric cylinder LZB series

                Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                  Electric slide table high rigidity type LESH series

                  • Promotional pricing

                  Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                    Electric actuator rod type with guide motorless specification LEYG series

                      Electric cylinder LZC series

                        Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                          Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                          • Promotional pricing

                          Electric Slide Table, Compact Type LES Series

                            Electric actuator slider type belt drive motorless specification LEFB series

                              Single Axis Robots RS1 / Linear

                                Electric actuator rod type LEY series AC servo motor LECS□

                                  Electric actuator guided rod type LEYG series AC servo motor LECS□

                                    Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                      Electric Cylinder, EAC Series

                                        Electric Slider, EZS Series

                                          Single Axis Robots RS3 / Linear

                                            Single Axis Robot RSH1

                                              Single Axis Robots RS3 Motor Wrap

                                                Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                  Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                    Electric Slider, EAS Series

                                                      Single Axis Robots RS1 / Motor Wrap

                                                        Rod Type with Support Guide

                                                          Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                            Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                              Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                Electric actuator rod type LEY series AC servo motor LECY□

                                                                  Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                      Single Axis Robot RSH2

                                                                        Single Axis Robot RSH3

                                                                          Single Axis Robots RSD2 / Rod Type

                                                                            Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                              Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                                Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                                  Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                                                                    Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                                                    Brand

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    ORIENTAL MOTOR

                                                                                    ORIENTAL MOTOR

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    ORIENTAL MOTOR

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    Product Series

                                                                                    Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

                                                                                    Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

                                                                                    Electric actuator rod type motorless specification LEY series

                                                                                    Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                                                    Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                                                                    Electric cylinder LZB series

                                                                                    Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                                                                                    Electric slide table high rigidity type LESH series

                                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                                                                    Electric actuator rod type with guide motorless specification LEYG series

                                                                                    Electric cylinder LZC series

                                                                                    Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                                                    Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                                    Electric Slide Table, Compact Type LES Series

                                                                                    Electric actuator slider type belt drive motorless specification LEFB series

                                                                                    Single Axis Robots RS1 / Linear

                                                                                    Electric actuator rod type LEY series AC servo motor LECS□

                                                                                    Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                                                    Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                                                                    Electric Cylinder, EAC Series

                                                                                    Electric Slider, EZS Series

                                                                                    Single Axis Robots RS3 / Linear

                                                                                    Single Axis Robot RSH1

                                                                                    Single Axis Robots RS3 Motor Wrap

                                                                                    Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                                    Electric Slider, EAS Series

                                                                                    Single Axis Robots RS1 / Motor Wrap

                                                                                    Rod Type with Support Guide

                                                                                    Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                                    Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                                    Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                    Electric actuator rod type LEY series AC servo motor LECY□

                                                                                    Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                    Single Axis Robot RSH2

                                                                                    Single Axis Robot RSH3

                                                                                    Single Axis Robots RSD2 / Rod Type

                                                                                    Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                                    Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                                    Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                                    Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                                                                    Electric actuator rod type with guide LEYG series AC servo motor LECY□

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                                                                                    Starting from

                                                                                    1,357.93 €

                                                                                    *Unit price with basic configuration

                                                                                    595.53 €

                                                                                    *Unit price with basic configuration

                                                                                    560.14 €

                                                                                    *Unit price with basic configuration

                                                                                    2,028.77 €

                                                                                    *Unit price with basic configuration

                                                                                    760.19 €

                                                                                    *Unit price with basic configuration

                                                                                    495.89 €

                                                                                    *Unit price with basic configuration

                                                                                    1,432.34 €

                                                                                    *Unit price with basic configuration

                                                                                    927.37 €

                                                                                    *Unit price with basic configuration

                                                                                    968.29 €

                                                                                    Special price

                                                                                    *Unit price with basic configuration

                                                                                    Promotional pricing

                                                                                    768.09 €

                                                                                    *Unit price with basic configuration

                                                                                    546.19 €

                                                                                    *Unit price with basic configuration

                                                                                    2,145.69 €

                                                                                    *Unit price with basic configuration

                                                                                    688.44 €

                                                                                    *Unit price with basic configuration

                                                                                    871.80 €

                                                                                    Special price

                                                                                    *Unit price with basic configuration

                                                                                    Promotional pricing

                                                                                    1,485.56 €

                                                                                    *Unit price with basic configuration

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                                                                                    1,000.57 €

                                                                                    *Unit price with basic configuration

                                                                                    1,213.06 €

                                                                                    *Unit price with basic configuration

                                                                                    1,296.96 €

                                                                                    *Unit price with basic configuration

                                                                                    532.55 €

                                                                                    *Unit price with basic configuration

                                                                                    681.97 €

                                                                                    *Unit price with basic configuration

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                                                                                    1,282.18 €

                                                                                    *Unit price with basic configuration

                                                                                    1,091.16 €

                                                                                    *Unit price with basic configuration

                                                                                    679.95 €

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                                                                                    2,602.01 €

                                                                                    *Unit price with basic configuration

                                                                                    2,814.41 €

                                                                                    *Unit price with basic configuration

                                                                                    2,841.41 €

                                                                                    *Unit price with basic configuration

                                                                                    1,181.27 €

                                                                                    *Unit price with basic configuration

                                                                                    1,065.37 €

                                                                                    *Unit price with basic configuration

                                                                                    1,348.27 €

                                                                                    *Unit price with basic configuration

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                                                                                    1,513.19 €

                                                                                    *Unit price with basic configuration

                                                                                    2,232.19 €

                                                                                    *Unit price with basic configuration

                                                                                    2,392.26 €

                                                                                    *Unit price with basic configuration

                                                                                    1,567.53 €

                                                                                    *Unit price with basic configuration

                                                                                    1,570.63 €

                                                                                    *Unit price with basic configuration

                                                                                    Min. Shipping Days 7 Days 7 Days 9 Days 26 Days 7 Days 26 Days 26 Days 26 Days 9 Days 9 Days 26 Days 26 Days 26 Days 26 Days 26 Days 14 Days 26 Days 26 Days 26 Days 18 Days 18 Days 14 Days 19 Days 14 Days 26 Days 26 Days 18 Days 14 Days 14 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 19 Days 19 Days 14 Days 26 Days 26 Days 26 Days 26 Days 26 Days
                                                                                    Main Body, Peripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain Body
                                                                                    TypeSlidersRodsRodsSlidersRodsRodsSlidersSlidersSlidersRodsRodsSlidersSlidersSlidersSlidersSlidersRodsRodsRodsSlidersSlidersSlidersSlidersSlidersSlidersSlidersSlidersSlidersRodsSlidersSlidersSlidersRodsRodsSlidersSlidersSlidersRodsSlidersSlidersSlidersSlidersRods
                                                                                    Stroke(mm)1,000 ~ 95030 ~ 50030 ~ 5001,000 ~ 250030 ~ 30025 ~ 20050 ~ 75050 ~ 15050 ~ 80030 ~ 30025 ~ 2001,000 ~ 9001,000 ~ 170030 ~ 1501,000 ~ 250050 ~ 40030 ~ 50030 ~ 30050 ~ 40050 ~ 30050 ~ 85050 ~ 800150 ~ 80050 ~ 8001,000 ~ 170050 ~ 60050 ~ 85050 ~ 40050 ~ 3001,000 ~ 25001,200 ~ 800200 ~ 40030 ~ 50030 ~ 500100 ~ 500150 ~ 1050150 ~ 105050 ~ 30050 ~ 7001,000 ~ 9001,000 ~ 8001,000 ~ 140050 ~ 300
                                                                                    Max. Transportable Mass Range (Horizontal)(kg)10.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.02.1 to 5.010.1 to 20.05.1 to 10.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.020.1 to 50.020.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.020.1 to 50.05.1 to 10.020.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.020.1 to 50.010.1 to 20.020.1 to 50.050.1 to 100.020.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.0
                                                                                    Max. Transportable Mass (Horizontal)(kg)11 ~ 2012 ~ 4018 ~ 301512 ~ 4011.9 ~ 2020122018 ~ 3011.9 ~ 201511515618 ~ 3018 ~ 3018 ~ 30--1220122011 ~ 30-625 ~ 4015151518 ~ 3030 ~ 40204060252020202018 ~ 60
                                                                                    Max. Transportable Mass Range (Vertical)(kg)0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.0-5.1 to 10.0 / 10.1 to 20.0-5.1 to 10.0 / 10.1 to 20.02.1 to 5.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0-2.1 to 5.0-2.1 to 5.0-2.1 to 5.05.1 to 10.0 / 10.1 to 20.05.1 to 10.05.1 to 10.0 / 10.1 to 20.010.1 to 20.010.1 to 20.02.1 to 5.02.1 to 5.02.1 to 5.0-0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.010.1 to 20.02.1 to 5.02.1 to 5.0-2.1 to 5.02.1 to 5.05.1 to 10.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0-2.1 to 5.05.1 to 10.0 / 10.1 to 20.0---5.1 to 10.0
                                                                                    Max. Transportable Mass (Vertical)(kg)0.5 ~ 158 ~ 128 ~ 12-7 ~ 11-8 ~ 1548 ~ 157 ~ 10-3-5-48 ~ 127 ~ 108 ~ 121412.5 ~ 14444-2 ~ 151444 ~ 11-338 ~ 97 ~ 118 ~ 158-58 ~ 15---7 ~ 17
                                                                                    Drive MethodRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewSlide ScrewsRolled Ball ScrewSlide ScrewsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsSlide ScrewsBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsBeltsBeltsRolled Ball Screw
                                                                                    GuideProvidedNot ProvidedProvidedProvidedProvidedNot ProvidedProvidedProvidedProvidedProvidedNot ProvidedProvidedProvidedProvidedProvided-Not ProvidedProvidedNot ProvidedNot Provided / ProvidedProvided---ProvidedProvidedProvided-ProvidedProvidedProvidedProvidedNot ProvidedNot ProvidedProvided--Not ProvidedProvidedProvidedProvidedProvidedProvided
                                                                                    Lead(mm)5 ~ 302.5 ~ 1612 ~ 2054 equivalent2.5 ~ 162 ~ 66 ~ 1286 ~ 1212 ~ 202 ~ 624Equivalent to 48854 equivalent212 ~ 2012 ~ 2012 ~ 20--6126Equivalent to 485 ~ 12-26 ~ 1254 equivalent242412 ~ 203 ~ 166 ~ 121010126 ~ 122727Equivalent to 4810 ~ 12
                                                                                    Input Power Supply24 V DC24 V DC--24 V DC24 V DC-24 V DC--24 V DC-24 V DC24 V DC-24 V DC---24/48 V DC ~ Single-Phase, 200 to 240 V AC24/48 V DC ~ Single-Phase, 200 to 230 V AC24 V DCSingle-Phase, 200 to 230 V AC24 V DC24 V DC24 V DC24/48 V DC ~ Single-Phase, 200 to 240 V AC24 V DC24 V DC----24 V DC-Single-Phase, 200 to 230 V ACSingle-Phase, 200 to 230 V AC24 V DC---24 V DC-
                                                                                    Position DetectionIncrementalIncremental-Incremental / AbsoluteIncremental-Incremental / AbsoluteIncrementalIncremental---IncrementalIncremental-IncrementalIncremental / AbsoluteIncremental / AbsoluteIncremental / AbsoluteAbsoluteAbsoluteIncrementalIncremental / AbsoluteIncrementalIncrementalIncrementalAbsoluteIncrementalIncrementalAbsoluteIncremental / AbsoluteAbsoluteAbsoluteIncrementalIncremental / AbsoluteIncremental / AbsoluteIncremental / AbsoluteIncrementalAbsoluteIncremental / AbsoluteAbsoluteIncrementalAbsolute
                                                                                    I/O ModuleNPN / PNP / DeviceNet / Ethernet / EtherCAT / IO-Link / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETPNP / Not Provided-NPN / PNP / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET--PNP / Not Provided-NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET-NPN / PNP / CC-Link / DeviceNet---Not ProvidedNot ProvidedNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / Ethernet / Not Provided / PROFINETNPN / PNP / Ethernet / Not Provided / PROFINETNot Provided-NPN / PNP / CC-Link / DeviceNet----PNP / Ethernet / Not Provided-NPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNet---NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET-
                                                                                    Table Width W1(mm)39.4 ~ 74--60--506150--10561606041-----528052108.739.4 ~ 5036 ~ 8741-60105105--508080-5010510571.7 ~ 124.7-
                                                                                    BrakeNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided
                                                                                    Max. Thrust Force Range(N)101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200
                                                                                    Max. Thrust Force(N)107.8 ~ 196111 ~ 189131 ~ 197147111 ~ 189117 ~ 196196180196131 ~ 197117 ~ 196147107.8180147150131 ~ 197131 ~ 197131 ~ 197125 ~ 200125 ~ 200120141120196107.8 ~ 294125 ~ 200150150 ~ 300147147147131 ~ 157122 ~ 189196169169150196196196196131 ~ 308
                                                                                    Noise FiltersNot Provided / ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not Provided / Provided-Not ProvidedNot ProvidedNot Provided--Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided
                                                                                    Table Length L1(mm)72 ~ 170--122--102143 ~ 285102--16078133.5 ~ 316.512258----72 ~ 10890789010072 ~ 10265 ~ 8058-122160160--10278154-102160160100-
                                                                                    Usage EnvironmentStandardStandardDust ResistantStandardStandardStandardStandardStandard / Dust ResistantStandardStandardStandardStandardStandardStandard / Dust ResistantStandardStandardStandardStandardDust ResistantStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardDust ResistantStandard / Dust ResistantStandardStandardStandardStandardStandardStandardStandardStandardStandard
                                                                                    Positioning Repeatability(µm)±15 ~ ±20±20±10 ~ ±20±60±20-±10 ~ ±20±50±10 ~ ±20±10 ~ ±20-±10 ~ ±20±80±50±60±20±20±10 ~ ±20±20--±20±20±20±80±15 ~ ±20-±20±20±60±10 ~ ±20±20±10 ~ ±20±20±20±10±10±20±10 ~ ±20±40±40±80±20
                                                                                    Maximum Velocity(mm/sec)1,200 ~ 1100125 ~ 5001,000 ~ 10002000125 ~ 50033 ~ 1001,500 ~ 900150270 ~ 9001,000 ~ 90033 ~ 100410 ~ 18001,00020020001001,000 ~ 10001,000 ~ 9001,000 ~ 900300 ~ 600300 ~ 8003007203001,000250 ~ 500270 ~ 800100250 ~ 5002000410 ~ 180018001,200 ~ 900100 ~ 400360 ~ 900600600500360 ~ 9002000200020001,000 ~ 900

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