Vacuum Valves（Type：Pilot Vacuum Valve）

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Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

SMC

Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

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Starting from^∗ ：	626.70 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

2D / 3D CAD data available

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Starting from^∗ ：	462.87 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

SMC

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Starting from^∗ ：	472.09 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

SMC

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

2D / 3D CAD data available

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Starting from^∗ ：	819.61 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration


Brand
Product Series
CAD
Starting from^∗
Min. Shipping Days
Type
Application
Installation method
Number of Ports
Types of solenoid
Switching Type
Electromagnetic valve drive type
Effective Sectional Area(mm2)
Pipe Port Type
Nominal Pipe Thread Size
Connection tube diameter
Flange Type
Flange Calls
Cv Value

	Select to compare	Select to compare	Select to compare	Select to compare
Brand	SMC	SMC	SMC	SMC
Product Series	Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series	Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series	Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series	Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD
CAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D
Starting from^∗	626.70 € *Unit price with basic configuration	462.87 € *Unit price with basic configuration	472.09 € *Unit price with basic configuration	819.61 € *Unit price with basic configuration
Min. Shipping Days	26 Days	26 Days	26 Days	26 Days
Type	Pilot Vacuum Valve	Pilot Vacuum Valve	Pilot Vacuum Valve	Pilot Vacuum Valve
Application	Single Item Operating	Single Item Operating	Single Item Operating	Single Item Operating
Installation method	Direct	Direct	Direct	Direct
Number of Ports	2-port valve	2-port valve	2-port valve	2-port valve
Types of solenoid	-	-	-	-
Switching Type	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed	2-position Normally Closed
Electromagnetic valve drive type	-	-	-	-
Effective Sectional Area(mm2)	-	-	-	-
Pipe Port Type	Flange	Flange	Flange	Flange
Nominal Pipe Thread Size	-	-	-	-
Connection tube diameter	-	-	-	-
Flange Type	KF	KF	KF	KF / CF
Flange Calls	25	16	25	25 / 40 / 50
Cv Value	-	-	-	-